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3 晶圓傳送盒(FOUP) Stage 設(shè)備前端模塊(EFEM)加載互鎖真空室(LOAD LOCK Chamber, 除氣或者冷卻)2 轉(zhuǎn)移室(Transfer Chambers)2 Slot Pass-Thru Stage除氣室或者冷卻室...
2024-01-29